The SRT-422 E-Beam Source Indexer provides accurate, reliable rotation control of multiple-crucible electron beam sources. The standard unit is designed to work with a variety of e-beam sources with internal 4 to 1 rotation reduction. Crucible pocket location patterns are provided which cover the majority of e-beam source designs. The unit consists of two components: 1) a remotely-mounted control panel and power supply and 2) a compact stepper motor drive unit.
The compact motor drive unit supports applications where space under the base plate is at a premium. It attaches to the air side of a standard rotary vacuum feedthough. The indexer can be controlled automatically from deposition controllers (like Sycon’s STC-2000 series), manually from the front panel or remotely from system controllers. The RS-232 interface is included as a standard feature.
The indexer controls pocket sources in either a unidirectional or bi-directional manner. In the bi-directional mode it is programmed to take the shortest direction to the next pocket. In the retrograde and continuous-trough configuration the speed of rotation is selectable. Interlock signals are provided to prevent rotation of the multi-pocket while e-beam power is applied, and to prevent powering of the e-beam until the pocket is in the proper location. Custom variations are available for unique pocket patterns.
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